Laser Micromachining of Silicon under an Ice Layer
หัวหน้าโครงการ
:
วิบุญ ตั้งวโรดมนุกูล
ทีมวิจัย
:
วิบุญ ตั้งวโรดมนุกูล
หัวหน้าโครงการ
อาษา ประทีปเสน
นักวิจัยที่ปรึกษา
วันที่เริ่มโครงการ
:
3 เม.ย. 2560
วัตถุประสงค์
:
This project will develop an innovative hybrid processing technology where ice and laser are combined to create a cold micromachining technology for high quality micro-fabrications without (or with negligible) thermal damages. To understand and optimize this micromachining process, a fundamental understanding of the temperature field, material removal mechanisms and machined surface integrity with respect to the process variables is essential, along with the process and optimization models for the effective and efficient use of this innovative technology. For this purpose, this project will focus on the micromachining of single-crystalline silicon substrates used in solar cells and other high-integrity, high-density systems, while the knowledge gained can be readily extended for other similar materials. Consequently, the aims of the project align with the following tasks and innovations:
(i) To experimentally study the micromachining performance (e.g. kerf width, depth, surface integrity, thermal damage) for the fabrication of micro-grooves under a wide range of process parameters, identify the governing parameters and explore new operating techniques to enhance the process performance.
(ii) To explore material removal or ablation mechanisms by laser heating and ice cooling of workpiece under different process conditions to control the material ablation for good surface integrity, minimum thermal effects and maximum cutting rates.
(iii) To develop mathematical models, based on the findings in Aims (i) and (ii) above, for predicting the major micromachining performance measures (e.g. kerf width, depth, taper) when micro-grooving silicon substrates.
(iv) To develop models, using the outcomes of Aims (i) to (iii), for optimizing the process parameters for damage-free micro-grooving of silicon substrates with this cold micromachining technology.
The breakthrough of this project, both in theory and technology, will make a critical impact to the micro-fabrication practices and enable the commercial production of high performance silicon solar cells of advanced designs as well as many other high-integrity, high-density systems for significant scientific, economic and environmental benefits.
